Edwards STP-XA2703C - REBUILT
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Weight | 165 lbs |
---|---|
Pumping Speed | 2,650 l/s |
Ultimate Pressure | 1 x 10-7 Pa |
Edwards Seiko Seiki STP-XA2703C Turbomolecular Vacuum Pump - REBUILT
An STP pump can be installed in any orientation and operate by remote control. If any rotor imbalance occurs (by deposition of process by-products, for example) sensors detect changes in its motion and compensate the magnetic fields accordingly. There are backup precision mechanical bearings to protect the pump in the event of a total disruption of magnetic suspension or a sudden massive air inrush that overcomes the magnetic bearing stiffness.
Model names ending in a C are corrosion-resistant, with nickel-coated rotors and stators and a nitrogen purge port. Ones with a prefix of H or A are high throughput pumps incorporating a hybrid pumping mechanism for higher gas flow. These are optimized for processes such as plasma etch. We also offer repair service.
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
Inlet flange | VG250 |
Pumping Speed | |
N2 | 2,650 l/s |
H2 | 2,050 l/s |
Compression ratio | |
N2 | > 108 |
H2 | > 6 x 103 |
Ultimate pressure | 10-7 Pa |
Max allowable backing pressure | 266 Pa |
Max allowable gas flow | |
N2 (water cooled) | 2,300 sccm |
(3.8 Pam3s-1) | |
Ar (water cooled) | 1,900 sccm |
(3.2 Pam3s-1) | |
Rated speed | 27,500 rpm |
Starting time | 8 min |
Mounting position | Any orientation |
Water cooling Flow | 3 lmin-1 |
Water cooling Temperature | 5-25 °C (41-77 °F) |
Pressure | 0.3 MPa |
Recommended purge gas flow | 50 sccm (8.4 x 10-2 Pam3s-1) |
Input voltage | 200 to 240 V a.c. (± 10) |
Power consumption | 1.5 kVA |
Pump weight | 75 kg (165 lb) |
Controller weight | 12 kg (26.4 lb) |
Specs Link
Type | Label | Description | Download |
---|---|---|---|
Edwards STP Series | Instruction Manual | Download | |
Edwards STP-XA2703 & XA3203 - REBUILT | Instruction Manual | Download |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
Edwards Seiko Seiki STP-XA2703C Turbomolecular Vacuum Pump - REBUILT P/N PT66-0Z-210 / PT660Z210 STP-XA2703C M0W9250 P/N YT66-0Z-110 / YT660Z110 STP-XA2703C VG250 P/N PT66-0Z-140 / PT660Z140 STP-XA2703C ISO250 P/N YT66-10-010 / YT6610010 STP-XA2703C DN250CF