Edwards STP1003/C - NEW
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SKU
NEW_STP1003C
| Weight | 69 lbs |
|---|---|
| Pumping Speed | 1,000 l/s |
| Ultimate Pressure | 1 x 10-9 Torr |
Edwards STP1003 / C Turbomolecular Vacuum Pump - NEW
Edwards corrosion resistant STP1003C is a new turbomolecular pump for use in the most advanced of semiconductor applications. Edwards’s rotor technology gives class-leading performance for maximum process flexibility. This pump has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.
Advanced Rotor Technology
- Maximized process flexibility
- Oil free
- Low vibration
- High reliability
- Maintenance free
- Harsh process compatible (C version)
- Increased life
Advanced Controller Design
- Auto tuning
- Self diagnostic functions
- DC motor drive
- Battery-free operation
Compact Design
- Small footprint
- Half rack controller
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Inlet flange | ISO-200F |
| Outlet port | KF-40 |
| Purge port | KF-10 |
| Water cooling fitting | PT1/4 |
| Pumping speed | |
| N2 | 1,000 l/s |
| H2 | 800 l/s |
| Compression ratio | |
| N2 | > 108 |
| H2 | 105 |
| Ultimate pressure w/ bake out heating | 10-7 Pa (10-9 Torr) |
| Max. continuous outlet pressure | 13 Pa (0.1 Torr) |
| Max. nitrogen throughput | 2,500 sccm |
| Rated speed | 35,000 rpm |
| Starting time | 6 min |
| Max inlet flange temperature | 120°C |
| Input voltage | 100 to 120 |
| Power consumption | 0.8 kVA |
| Weight | 31 kg |
| Type | Label | Description | Download |
|---|---|---|---|
|
Edwards STP Series | Instruction Manual | Download |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
Edwards STP1003 / C Turbomolecular Vacuum Pump - NEW
P/N YT39-0Z-001 / YT390Z001 STP1003 ISO-200F
P/N YT39-B0-010 / YT39B0010 STP1003 DN 200 CF
P/N YT39-B0-130 / YT39B0130 STP1003C ISO-200F
PT39-AZ-003 / PT39AZ003 STP1003C DN 200 CF
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