Edwards STPA1303C - NEW
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SKU
NEW_STPA1303C
| Weight | 85 lbs |
|---|---|
| Pumping Speed | 1,300 l/s |
| Ultimate Pressure | 1 x 10-9 Torr |
Edwards STPA1303C Turbomolecular Vacuum Pump - NEW
Edwards STPA1303C is a turbomolecular pump designed for use in semiconductor applications. Edwards advanced rotor technology gives class-leading performance for maximum process flexibility. The STPA1303C has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.
Advanced Rotor Technology
- Higher gas throughput
- Maximized process flexibility
- Oil free
- Low vibration
- High reliability
- Maintenance free
- Harsh process compatible
- Increased life
Advanced Controller Design
- Auto tuning
- Self diagnostic functions
- DC motor drive
- Battery-free operation
Compact Design
- Small footprint
- Half rack controller
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Inlet flange | ISO-200F |
| Outlet port | KF-40 |
| Purge port | KF-10 |
| Water cooling fitting | PT1/4 |
| Pumping speed | |
| N2 | 1,300 l/s |
| H2 | 800 l/s |
| Compression ratio | |
| N2 | > 108 |
| H2 | 103 |
| Ultimate pressure w/ bake out heating | 10-7 Pa (10-9 Torr) |
| Max. continuous outlet pressure | 270 Pa (2 Torr) |
| Max. nitrogen throughput | 1,500 sccm |
| Rated speed | 35,500 rpm |
| Starting time | 7 min |
| Max inlet flange temperature | 120°C |
| Input voltage | 200 to 240 |
| Power consumption | 0.85 kVA |
| Weight | 39 kg |
| Type | Label | Description | Download |
|---|---|---|---|
|
Edwards STP Series | Instruction Manual | Download |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
Edwards STPA1303C Turbomolecular Vacuum Pump - NEW
P/N B718-02-020 / B71802020 STPA1303C ISO-200F
P/N YT36-B0-030 / YT36B0030 STPA1303C DN 200 CF
P/N YT36-26-005 / YT3626005 STPA1303C ISO-200F TMS
YT36-26-004 / YT3626004 STPA1303C DN 200 CF TMS
YT36-B0-100 / YT36B0100 STPA1303CV ISO-200F w/ heater band