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Edwards STPA1303CV - NEW

Name: Edwards STPA1303CV - NEW
Brand: Edwards
SKU: NEW_STPA1303CV

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SKU

NEW_STPA1303CV

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Weight	87 lbs
Pumping Speed	1,300 l/s
Ultimate Pressure	1 x 10^-9 Torr

Description

Edwards STPA1303CV Turbomolecular Vacuum Pump - NEW

Edwards STPA1303CV is a turbomolecular pump designed for use in semiconductor applications. Edwards advanced rotor technology gives class-leading performance for maximum process flexibility. The STPA1303C has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.

Advanced Rotor Technology

Higher gas throughput
Maximized process flexibility
Oil free
Low vibration
High reliability
Maintenance free
Harsh process compatible
Increased life

Advanced Controller Design

Auto tuning
Self diagnostic functions
DC motor drive
Battery-free operation

Compact Design

Small footprint
Half rack controller

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Specification

Inlet flange	ISO-200F
Outlet port	KF-40
Purge port	KF-10
Water cooling fitting	PT1/4
Pumping speed
N₂	1,300 l/s
H₂	800 l/s
Compression ratio
N₂	> 10⁸
H₂	10³
Ultimate pressure w/ bake out heating	10^-7 Pa (10^-9 Torr)
Max. continuous outlet pressure	270 Pa (2 Torr)
Max. nitrogen throughput	1,500 sccm
Rated speed	35,500 rpm
Starting time	7 min
Max inlet flange temperature	120°C
Input voltage	200 to 240
Power consumption	0.85 kVA
Weight	39 kg

Digital Manuals

Type	Label	Description	Download
	Edwards STP Series	Instruction Manual	Download

RFQ/Configuration

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.

Edwards STPA1303CV Turbomolecular Vacuum Pump - NEW

P/N B718-02-020 / B71802020  STPA1303C  ISO-200F
P/N YT36-B0-030 / YT36B0030  STPA1303C  DN 200 CF
P/N YT36-26-005 / YT3626005  STPA1303C  ISO-200F TMS
    YT36-26-004 / YT3626004  STPA1303C  DN 200 CF TMS
    YT36-B0-100 / YT36B0100  STPA1303CV  ISO-200F w/ heater band