Edwards STPA1603C Turbomolecular Vacuum Pump - NEW
The small and powerful Edwards STPA1603C turbomolecular pump has been designed using Edwards advanced rotor technology. This provides high throughput, maximum reliability and class leading performance which is demanded by the latest generation of semiconductor processes. Its half rack controller and compact design provide considerable space saving, whilst its advanced deposition reduction system gives improved reliability and performance. The STPA1603C has been qualified on the latest 200 mm etch tools as well as on new generation 300 mm oxide etch processes.
Advanced Rotor Design
Increased performance
Higher gas throughput
High reliability
Maintenance free
Harsh process compatible
5 Axis Magnetic Suspension System
Zero contamination
Low vibration
Corrosion Resistant
Harsh process compatible
Increased life
Compact Design
Small footprint
Half rack controller
Advanced Controller Design
Auto tuning
Self diagnostic functions
DC motor drive
Battery-free operation
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
