Edwards STPA2203C - NEW
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| Weight | 134 lbs |
|---|---|
| Pumping Speed | 2,200 l/s |
| Ultimate Pressure | 1 x 10-8 Torr |
Edwards STPA2203C Turbomolecular Vacuum Pump - NEW
Edwards STPA2203C is a new turbomolecular pump designed for use in semiconductor applications. It has advanced rotor technology that gives class-leading performance for maximum process flexibility. A new half rack controller gives additional space savings and incorporates d.c. drive technology for battery-free operation. The STPA2203C has been approved for use by major etch, ion implant and deposition equipment manufacturers in the semiconductor and magnetic media industries.
Advanced Rotor Design
- Higher gas throughput
- Maximized process flexibility
5 Axis Magnetic Suspension System
- Zero contamination
- Low maintenance
Corrosion Resistant
- Harsh process compatible
- Increased life
Compact Design
- Small footprint
- Half rack controller
Advanced Controller Design
- Auto tuning
- Self diagnostic functions
- DC motor drive
- Battery-free operation
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Inlet flange | ISO-250F |
| Outlet port | KF-40 |
| Purge port | KF-10 |
| Water cooling fitting | PT1/4 |
| Pumping speed | |
| N2 | 2,200 l/s |
| H2 | 1,700 l/s |
| Compression ratio | |
| N2 | > 108 |
| H2 | > 2.5 x 104 |
| Ultimate pressure | 10-6 Pa (10-8 Torr) |
| Max. allowable backing pressure | 400 Pa (3 Torr) |
| Max. nitrogen throughput | 1,500 sccm |
| Rated speed | 27,000 |
| Starting time | 7 min |
| Mounting position | Any |
| Water cooling flow | 2 l/min-1 |
| Water cooling temperature | 5 - 25°C |
| Pressure | 0.3 MPa |
| Recommended purge gas flow | 20 sccm |
| Input voltage | 200 to 240 VAC |
| Power consumption | 1.5 kVA |
| Weight | 61 kg |
| Type | Label | Description | Download |
|---|---|---|---|
|
Edwards STP Series | Instruction Manual | Download |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
Edwards STPA2203C Turbomolecular Vacuum Pump - NEW
P/N YT4V-0Z-002 / YT4V0Z002 STPA2203C ISO-250F
P/N YT4V-0Z-003 / YT4V0Z003 STPA2203C DN 250 CF
P/N YT4V-66-001 / YT4V66001 STPA2203CV ISO-250F TMS
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