Edwards STPA803C turbomolecular pump is designed for use in semiconductor applications. Edwards advanced rotor technology gives class-leading performance for maximum process flexibility. The STPA803C has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.
Advanced Rotor Technology
Maximized process flexibility
Oil free
Low vibration
High reliability
Maintenance free
Harsh process compatible
Increased life
Advanced Controller Design
Auto tuning
Self diagnostic functions
DC motor drive
Battery-free operation
Compact Design
Small footprint
Half rack controller
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
