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Edwards STPA803C - NEW

Name: Edwards STPA803C - NEW
Brand: Edwards
SKU: NEW_STPA803C

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SKU

NEW_STPA803C

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Weight	85.98 lbs
Pumping Speed	800 l/s
Ultimate Pressure	1 x 10^-9 Torr

Dimensions

Description

Edwards STPA803C Turbomolecular Vacuum Pump - NEW

Edwards STPA803C turbomolecular pump is designed for use in semiconductor applications. Edwards advanced rotor technology gives class-leading performance for maximum process flexibility. The STPA803C has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.

Advanced Rotor Technology

Maximized process flexibility
Oil free
Low vibration
High reliability
Maintenance free
Harsh process compatible
Increased life

Advanced Controller Design

Auto tuning
Self diagnostic functions
DC motor drive
Battery-free operation

Compact Design

Small footprint
Half rack controller

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Specification

Inlet flange	ISO160F
Outlet port	KF40
Purge port	KF10
Water cooling fitting	PT1/4
Pumping Speed
N₂	800 l/s
H₂	520 l/s
Compression ratio
N₂	>10⁸
H₂	10³
Ultimate pressure with bake out heating	10^-7 Pa (10^-9 Torr)
Max continuous outlet pressure	270 Pa (2 Torr)
Max Nitrogen throughput	1,500 sccm
Rated speed	32,500 rpm
Starting time	7 min
Max inlet flange temperature	120 °C
Input voltage	200 to 240 (± 10) V a.c.
Power consumption	0.85 kVA
Pump weight	39 kg
Controller weight	9 kg

Digital Manuals

Type	Label	Description	Download
	Edwards STP Series	Instruction Manual	Download

RFQ/Configuration

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.

Edwards STPA803C Turbomolecular Vacuum Pump - NEW

P/N YT36-B0-040 / YT36B0040  STPA803C  ISO-160F
P/N YT36-B0-010 / YT36B0010  STPA803C  DN 160 CF
P/N YT36-26-000 / YT3626000  STPA803CV  ISO-160F TMS
    YT36-26-003 / YT3626003  STPA803CV  DN 160 CF TMS