Edwards STPA803C - NEW
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In stock
SKU
NEW_STPA803C
| Weight | 85.98 lbs |
|---|---|
| Pumping Speed | 800 l/s |
| Ultimate Pressure | 1 x 10-9 Torr |
Edwards STPA803C Turbomolecular Vacuum Pump - NEW
Edwards STPA803C turbomolecular pump is designed for use in semiconductor applications. Edwards advanced rotor technology gives class-leading performance for maximum process flexibility. The STPA803C has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.
Advanced Rotor Technology
- Maximized process flexibility
- Oil free
- Low vibration
- High reliability
- Maintenance free
- Harsh process compatible
- Increased life
Advanced Controller Design
- Auto tuning
- Self diagnostic functions
- DC motor drive
- Battery-free operation
Compact Design
- Small footprint
- Half rack controller
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Inlet flange | ISO160F |
| Outlet port | KF40 |
| Purge port | KF10 |
| Water cooling fitting | PT1/4 |
| Pumping Speed | |
| N2 | 800 l/s |
| H2 | 520 l/s |
| Compression ratio | |
| N2 | >108 |
| H2 | 103 |
| Ultimate pressure with bake out heating | 10-7 Pa (10-9 Torr) |
| Max continuous outlet pressure | 270 Pa (2 Torr) |
| Max Nitrogen throughput | 1500 sccm |
| Rated speed | 32500 rpm |
| Starting time | 7 min |
| Max inlet flange temperature | 120 °C |
| Input voltage | 200 to 240 (± 10) V a.c. |
| Power consumption | 0.85 kVA |
| Pump weight | 39 kg |
| Controller weight | 9 kg |
| Type | Label | Description | Download |
|---|---|---|---|
|
Edwards STP Series | Instruction Manual | Download |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
Edwards STPA803C Turbomolecular Vacuum Pump - NEW
P/N YT36-B0-040 / YT36B0040 STPA803C ISO-160F
P/N YT36-B0-010 / YT36B0010 STPA803C DN 160 CF
P/N YT36-26-000 / YT3626000 STPA803CV ISO-160F TMS
YT36-26-003 / YT3626003 STPA803CV DN 160 CF TMS
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