Pfeiffer ATH 500 M - NEW
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In stock
SKU
NEW_ATH500M
| Weight | 37 lbs |
|---|---|
| Pumping Speed | 550 l/s |
| Ultimate Pressure | < 1 x 10-8 mbar |
Pfeiffer ATH 500 M Turbomolecular Vacuum Pump - NEW
Compact
Small footprint, integrated drive unit, installation in any orientation
Quiet
Low noise and vibration levels, perfectly suited for vibration-sensitive applications in semiconductor manufacturing processes and analytical instrumentation
Flexible
Compatible with a variety of backing pumps, MT version with integrated heating system for demanding chemical conditions, frequency controlled direct current (DC) motors
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Pumping speed N2 | 350 - 550 l/s |
| Pumping speed Ar | 320 - 530 l/s |
| Pumping speed He | 310 - 390 l/s |
| Pumping speed H2 | 170 - 190 l/s |
| Compression ratio (ISO 5302) N2 | 2 x 107 l/s |
| Compression ratio (ISO 5302) Ar | 8 x 106 l/s |
| Compression ratio (ISO 5302) He | 1 x 104 l/s |
| Compression ratio (ISO 5302) H2 | 2 x 102 l/s |
| Ultimate pressure | < 1 x 10-8 mbar |
| Max. forevacuum N2 | 2.6 mbar |
| Max. forevacuum Ar | 3.3 mbar |
| Max. forevacuum He | 1.0 mbar |
| Max. forevacuum H2 | 0.25 mbar |
| Max. inlet vacuum N2 | 1.0 mbar |
| Max. inlet vacuum Ar | 1.0 mbar |
| Max. inlet vacuum He | 10 mbar |
| Max. inlet vacuum H2 | 10 mbar |
| Gas throughput at final rotational speed N2 | 4,000 sccm |
| Gas throughput at final rotational speed Ar | 2,500 sccm |
| Gas throughput at final rotational speed He | > 10,000 sccm |
| Gas throughput at final rotational speed H2 | > 10,000 sccm |
| Recommended purge flow rate | 50 sccm |
| Rotational speed | 50,000 rpm |
| Rotational speed variable | 15,000 rpm to nominal speed |
| Run-up time up to 90% of final rotational speed, with pressure exhaust < 0.1 mbar | < 2 min |
| Controller power supply | 48 VDC/td> |
| Max. power consumption for start-up | 560 W |
| Nominal power (stand-by power) | 100 W |
| Max. baking temperature | 120°C |
| Recommended cooling water flow rate | 60 l/h |
| Cooling water temperature | 15-25°C |
| Remote controller type | Magpower |
| Recommended backing pump | ACP40 |
| Sound pressure level (ISO 2151) 1m distance at nominal speed | < 42 dB(A) |
| Vibration level at nominal speed | < 0.01 μm |
| Dimensions (Ø x H) | 180 x 159.3-209.3* mm (* depending on flange variant) |
| Weight approx. | 17 kg |
| Gas inlet / Gas outlet | DN 100, DN 160 / DN 25 ISO-KF |
| N2 purge flange | 1/8 G (ISO 228) |
| Stainless steel inlet screen (factory setting) | Yes |
| Permissible magnetic field (radial value) at 10 cm | < 12 mT |
| On-board control option | Profibus, Remote |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
Pfeiffer ATH 500 M Turbomolecular Vacuum Pump - NEW
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