Pfeiffer ATP 1603 M - NEW
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| Weight | 75 lbs |
|---|---|
| Pumping Speed | 1,360 - 1,400 l/s |
| Ultimate Pressure | < 6 x 10-9 mbar |
Pfeiffer ATP 1603 M Turbomolecular Vacuum Pump - NEW
Maintenance-free
No wearing parts thanks to magnetic bearing technology, reduced particle contamination or build-up of residue in MT version
Flexible
Compatible with a variety of backing pumps, MT version with integrated heating system for demanding chemical conditions, frequency controlled direct current (DC) motors
Quiet
Low noise and vibration levels, perfectly suited for vibration-sensitive applications in semiconductor manufacturing processes and analytical instrumentation
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Pumping speed N2 | 1,360 - 1,400 l/s |
| Pumping speed Ar | 1,280 - 1,350 l/s |
| Pumping speed He | 940 - 970 l/s |
| Pumping speed H2 | 540 l/s |
| Compression ratio (ISO 5302) N2 | > 1 x 108 l/s |
| Compression ratio (ISO 5302) Ar | > 1 x 108 l/s |
| Compression ratio (ISO 5302) He | 4 x 103 l/s |
| Compression ratio (ISO 5302) H2 | 5 x 102 l/s |
| Ultimate pressure | < 6 x 10-9 mbar |
| Max. forevacuum N2 | 1.7 mbar |
| Max. forevacuum Ar | 2.5 mbar |
| Max. forevacuum He | 1.2 mbar |
| Max. forevacuum H2 | 0.3 mbar |
| Max. inlet vacuum N2 | 0.015 mbar |
| Max. inlet vacuum Ar | 0.026 mbar |
| Max. inlet vacuum He | > 0.6 mbar |
| Max. inlet vacuum H2 | > 0.6 mbar |
| Gas throughput at final rotational speed N2 | 4,000 sccm |
| Gas throughput at final rotational speed Ar | 1,200 sccm |
| Gas throughput at final rotational speed He | > 4,000 sccm |
| Gas throughput at final rotational speed H2 | > 4,000 sccm |
| Recommended purge flow rate | 50 sccm |
| Rotational speed | 39,000 rpm |
| Rotational speed variable | 15,000 rpm to nominal speed |
| Run-up time up to 90% of final rotational speed, with pressure exhaust < 0.1 mbar | < 6 min |
| Controller power supply | 200-240 V, 50/60 Hz Single-phase |
| Max. power consumption for start-up | 650 W |
| Nominal power (stand-by power) | 200 W |
| Max. heating temperature | N/A |
| Max. baking temperature | 120°C |
| Recommended cooling water flow rate | 60 l/h |
| Cooling water temperature | 15-40°C |
| Remote controller type | Magpower |
| Recommended backing pump | ADP/ADS |
| Sound pressure level (ISO 2151) 1m distance at nominal speed | < 48 dB(A) |
| Vibration level at nominal speed | < 0.01 μm |
| Dimensions (Ø x H) | 305 x 317.2-327.5* mm (* depending on flange variant) |
| Weight approx. | 34 kg |
| Controller weight approx. | 8.7 kg |
| Gas inlet / Gas outlet | DN 200, DN 250 / DN 40 ISO-KF |
| N2 purge flange | DN 16 ISO-KF |
| Stainless steel inlet screen (factory setting) | Yes |
| Permissible magnetic field (radial value) at 10 cm | < 12 mT |
| On-board control option | Profibus, Remote |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
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