Shimadzu TMP-403LM - REBUILT

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In stock
SKU
REBUILT_TMP403LM
Weight 35 lbs
Pumping Speed 420 l/s
Ultimate Pressure 1 x 10-8 Pa

Shimadzu TMP-403LM Turbomolecular Vacuum Pump - REBUILT

This Shimadzu TMP-403LM high pumping throughput molecular pump is clean. View our inventory of Shimadzu turbo pumps.

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urbomolecular pump TMP-403M TMP-403MC TMP-403LM TMP-403LMC
Suitable power supply unit EI-D303M
Cooling method Cooling fan Water
Ultimate pressure (Note 1) 10-8 Pa order 10-7 Pa order 10-8 Pa order 10-7 Pa order
Maximum allowable inlet pressure
(N2)
1.3 Pa 200 Pa
Maximum allowable outlet pressure 40 Pa 400 Pa
Pumping speed (Note 4) N2 420 l/s
He 360 l/s
H2 340 l/s
Compression ratio N2 1 x 109
He 8 x 104
H2 1 x 104
Rated speed 45,000 rpm
Start-up time 5 minutes or less
Mounting position In any desired direction (Note 7)
Bake-out temperature at an inlet flange 120°C or less
Vibration level (by Shimadzu's method) 0.012 µm or less (0-peak)
Inlet flange ICF203 (Note 6)
Outlet flange KF25
Mass 14 kg
Admissible throughput of purge gas 20 to 30 ml/min (Note 8)
Admissible pumping speed of backing vacuum pump in case of gas purge 200 l/min or more
Environmental temperatures Operation: 0 to 40°C / Storage: -25 to 70°C
Admissible ambient magnetic field Radial direction 3 mT
Axial direction 15 mT
Water Flow rate N/A 1 to 3 l/min
Pressure 0.2 to 0.5 MPa
Temperature 5 to 30°C
  • (Note 1) When using a metal at the inlet flange. When using an o-ring gasket
Type Label Description Download
Shimadzu TMP 403 - REBUILT Instruction Manual Download

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Shimadzu TMP-403LM Turbomolecular Vacuum Pump - REBUILT

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262-81455-53 / 2628145553  TMP-403LMC  ISO160
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262-81455-73 / 2628145573  TMP-403MC  ISO160