Shimadzu TMP-403LM - REBUILT
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SKU
REBUILT_TMP403LM
Weight | 35 lbs |
---|---|
Pumping Speed | 420 l/s |
Ultimate Pressure | 1 x 10-8 Pa |
Shimadzu TMP-403LM Turbomolecular Vacuum Pump - REBUILT
This Shimadzu TMP-403LM high pumping throughput molecular pump is clean. View our inventory of Shimadzu turbo pumps.
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urbomolecular pump | TMP-403M | TMP-403MC | TMP-403LM | TMP-403LMC | |
---|---|---|---|---|---|
Suitable power supply unit | EI-D303M | ||||
Cooling method | Cooling fan | Water | |||
Ultimate pressure (Note 1) | 10-8 Pa order | 10-7 Pa order | 10-8 Pa order | 10-7 Pa order | |
Maximum allowable inlet pressure (N2) |
1.3 Pa | 200 Pa | |||
Maximum allowable outlet pressure | 40 Pa | 400 Pa | |||
Pumping speed (Note 4) | N2 | 420 l/s | |||
He | 360 l/s | ||||
H2 | 340 l/s | ||||
Compression ratio | N2 | 1 x 109 | |||
He | 8 x 104 | ||||
H2 | 1 x 104 | ||||
Rated speed | 45,000 rpm | ||||
Start-up time | 5 minutes or less | ||||
Mounting position | In any desired direction (Note 7) | ||||
Bake-out temperature at an inlet flange | 120°C or less | ||||
Vibration level (by Shimadzu's method) | 0.012 µm or less (0-peak) | ||||
Inlet flange | ICF203 (Note 6) | ||||
Outlet flange | KF25 | ||||
Mass | 14 kg | ||||
Admissible throughput of purge gas | 20 to 30 ml/min (Note 8) | ||||
Admissible pumping speed of backing vacuum pump in case of gas purge | 200 l/min or more | ||||
Environmental temperatures | Operation: 0 to 40°C / Storage: -25 to 70°C | ||||
Admissible ambient magnetic field | Radial direction | 3 mT | |||
Axial direction | 15 mT | ||||
Water | Flow rate | N/A | 1 to 3 l/min | ||
Pressure | 0.2 to 0.5 MPa | ||||
Temperature | 5 to 30°C |
- (Note 1) When using a metal at the inlet flange. When using an o-ring gasket
Type | Label | Description | Download |
---|---|---|---|
Shimadzu TMP 403 - REBUILT | Instruction Manual | Download |
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Shimadzu TMP-403LM Turbomolecular Vacuum Pump - REBUILT 262-81455-41 / 2628145541 TMP-403LM ICF203 262-81455-42 / 2628145542 TMP-403LM VG150 262-81455-43 / 2628145543 TMP-403LM ISO160 262-81455-51 / 2628145551 TMP-403LMC ICF203 262-81455-52 / 2628145552 TMP-403LMC VG150 262-81455-53 / 2628145553 TMP-403LMC ISO160 262-81455-61 / 2628145561 TMP-403M ICF203 262-81455-62 / 2628145562 TMP-403M VG150 262-81455-63 / 2628145563 TMP-403M ISO160 262-81455-71 / 2628145571 TMP-403MC ICF203 262-81455-72 / 2628145572 TMP-403MC VG150 262-81455-73 / 2628145573 TMP-403MC ISO160