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VAT 64248-UE52 12" OD CF - REBUILT
VAT 64248-UE52 Series 642 DN 250 12" OD CF Vacuum Throttle Control Gate Valve
For semiconductor, FPD and industrial processes, e.g. sputtering and etching systems.
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Inside diameter (ID) in mm |
DN 250 |
| Flange |
CF-F fixed flange UNF threads (compatible with ISO 3669) |
| Body material |
Stainless steel |
| Actuator |
Stepper motor |
| Solenoid |
No |
| Position indicator |
No |
| Pressure min. |
1 x 10-8 mbar |
| Pressure max. |
1.2 bar (abs) |
| Feedthrough |
Rotary feedthrough |
| Sealing technology |
VATLOCK-System |
| Sealhead description |
FKM (VITON®) |
| Sealing materials |
FKM (VITON®) |
| Molecular flow conductance l/s |
22,000 |
| Min. controllable conductance |
2.5 |
| Max. differential pressure closed position in bar |
1.2 |
| Max. pressure on seat side during opening in bar |
0.03 |
| Closing or opening time in sec. |
10 |
| Valve body temperature max. in °C |
150 |
| Actuator temperature max. in °C |
50 |
| Weight in kg / lbs |
62 / 136.69 |
| Type |
Label |
Description |
Download |
|
|
VAT Series 64.2, DN 160 - 400 - REBUILT |
Installation, Operating & Maintenance Instructions |
Download
|
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
VAT Fabrication No. 64248-UE52 Series 642 DN 250 12" OD CF Vacuum Throttle Control Gate Valve
