VAT 64250-TE52 10" ASA - REBUILT
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SKU
REBUILT_64250-TE52
VAT 64250-TE52 Series 642 DN 320 10" ASA Vacuum Throttle Control Gate Valve
For semiconductor, FPD and industrial processes, e.g. sputtering and etching systems.
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Inside diameter (ID) in mm | DN 320 |
| Flange | ASA-LP (compatible with ANSI B. 16.5) |
| Body material | Stainless steel |
| Actuator | Stepper motor |
| Solenoid | No |
| Position indicator | No |
| Pressure min. | 1 x 10-8 mbar |
| Pressure max. | 1.2 bar (abs) |
| Feedthrough | Rotary feedthrough |
| Sealing technology | VATLOCK-System |
| Sealhead description | FKM (VITON®) |
| Sealing materials | FKM (VITON®) |
| Molecular flow conductance l/s | 30,000 |
| Min. controllable conductance | 3.2 |
| Max. differential pressure closed position in bar | 1.2 |
| Max. pressure on seat side during opening in bar | 0.03 |
| Closing or opening time in sec. | 10 |
| Valve body temperature max. in °C | 150 |
| Actuator temperature max. in °C | 50 |
| Weight in kg / lbs | 112 / 246.92 |
| Type | Label | Description | Download |
|---|---|---|---|
|
VAT Series 64.2, DN 160 - 400 - REBUILT | Installation, Operating & Maintenance Instructions | Download |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
VAT FILE NO. 64250-TE52 Series 642 DN 320 10"" ASA Vacuum Throttle Control Gate Valve
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