VAT 64250-UE52 14" OD CF - REBUILT

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VAT 64250-UE52 Series 642 DN 320 OD 14" Conflat Vacuum Throttle Control Gate Valve

For semiconductor, FPD and industrial processes, e.g. sputtering and etching systems.

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Inside diameter (ID) in mm (inch) 320 (12")
Flange CF-F fixed flange UNF threads (compatible with ISO 3669)
Body material Stainless steel
Actuator Stepper motor
Solenoid No
Position indicator No
Pressure min. 1 x 10-8 mbar
Pressure max. 1.2 bar (abs)
Feedthrough Rotary feedthrough
Sealing technology VATLOCK-System
Sealhead description FKM (VITON®)
Sealing materials FKM (VITON®)
Molecular flow conductance l/s 30,000
Min. controllable conductance 3.2
Max. differential pressure closed position in bar 1.2
Max. pressure on seat side during opening in bar     0.03
Closing or opening time in sec. 10
Valve body temperature max. in °C 150
Actuator temperature max. in °C 50
Weight in kg / lbs 112 / 246.92
Type Label Description Download
VAT Series 64.2, DN 160 - 400 - REBUILT Installation, Operating & Maintenance Instructions Download

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VAT Fabrication No. 64250-UE52 Series 642 DN 320 OD 14"" Conflat Vacuum Throttle Control Gate Valve