VAT 64250-UE52 14" OD CF - REBUILT
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SKU
REBUILT_64250-UE52
VAT 64250-UE52 Series 642 DN 320 OD 14" Conflat Vacuum Throttle Control Gate Valve
For semiconductor, FPD and industrial processes, e.g. sputtering and etching systems.
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| Inside diameter (ID) in mm (inch) | 320 (12") |
| Flange | CF-F fixed flange UNF threads (compatible with ISO 3669) |
| Body material | Stainless steel |
| Actuator | Stepper motor |
| Solenoid | No |
| Position indicator | No |
| Pressure min. | 1 x 10-8 mbar |
| Pressure max. | 1.2 bar (abs) |
| Feedthrough | Rotary feedthrough |
| Sealing technology | VATLOCK-System |
| Sealhead description | FKM (VITON®) |
| Sealing materials | FKM (VITON®) |
| Molecular flow conductance l/s | 30,000 |
| Min. controllable conductance | 3.2 |
| Max. differential pressure closed position in bar | 1.2 |
| Max. pressure on seat side during opening in bar | 0.03 |
| Closing or opening time in sec. | 10 |
| Valve body temperature max. in °C | 150 |
| Actuator temperature max. in °C | 50 |
| Weight in kg / lbs | 112 / 246.92 |
| Type | Label | Description | Download |
|---|---|---|---|
|
VAT Series 64.2, DN 160 - 400 - REBUILT | Installation, Operating & Maintenance Instructions | Download |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
VAT Fabrication No. 64250-UE52 Series 642 DN 320 OD 14"" Conflat Vacuum Throttle Control Gate Valve
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