Edwards EPX180LE - NEW
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Weight | 96 lbs |
---|---|
Pumping Speed | 170 m3h-1 |
Ultimate Pressure | <7.5 x 10-5 Torr |
Edwards EPX180LE 208V Semiconductor Dry Vacuum Pump - NEW
The new compact EPX180 high vacuum dry pump offers enhanced performance with a reduced cost of ownership. Using a unique patent-protected mechanism the EPX180 is capable of pumping from the atmosphere to ultimate pressures of < 7.5 x 10-5 Torr. The EPX LE series of pumps has an End User Controller (EUC). The End User Controller enables local control for stand-alone use as well as the ability to connect to a fab-wide network for remote control and monitoring.
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
Peak Speed | 170 m3h-1 / 105 ft3min-1 / 2,835 lmin-1 |
Ultimate Vacuum | < 1 x 104 mbar / < 7.5 x 10-5 / < 1 x 10-2 Pa Torr |
Warm up time (to nominal performance) | 30 min |
Inlet Flange | ISO63 |
Outlet flange | NW25 |
Noise | < 59 dB(A) |
Water connectors | 3/8 in Quick |
Minimum cooling water flow rate | 2 lmin-1 |
Cooling water temperature | 15 - 35°C |
Electrical supply | 200/208 V, 50/60 Hz 3-phase |
Power at ultimate | 1.4 kW |
Rated motor power | 3.0 kW |
TIM | None |
Weight | 43.5 kg |
Type | Label | Description | Download |
---|---|---|---|
Edwards EPX HiVac Series | Instruction Manual | Download |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
Edwards EPX180LE 208V Semiconductor Dry Vacuum Pump - NEW A41943012 / A419-43-012 EPX180LE 208V No TIM 3/8 water connector A41943014 / A419-43-014 EPX180LE 400V No TIM 3/8 water connectors A41943022 / A419-43-022 EPX180LE 208V No TIM 1/4 water connector A41943024 / A419-43-024 EPX180LE 400V No TIM 1/4 water connectors A41943112 / A419-43-112 EPX180LE 208V C3 TIM 3/8 water connector A41943212 / A419-43-212 EPX180LE 208V SPI TIM 3/8 water connector A41943222 / A419-43-222 EPX180LE 208V SPI TIM 1/4 water connector A41943224 / A419-43-224 EPX180LE 400V SPI TIM 1/4 water connectors A41943412 / A419-43-412 EPX180LE 208V TEL TIM 3/8 water connector A41943612 / A419-43-612 EPX180LE 208V Hitachi TIM 3/8 water connector A41943712 / A419-43-712 EPX180LE 208V MCM TIM 3/8 water connector A41943714 / A419-43-714 EPX180LE 400V MCM TIM 3/8 water connectors A41943722 / A419-43-722 EPX180LE 208V MCM TIM 1/4 water connector
OBSOLETED A40902977 / A409-02-977 IPX100 A40902973 / A409-02-973 IPX100 A40904977 / A409-04-977 IPX100A A40904973 / A409-04-973 IPX100A A40924977 / A409-24-977 IPX180A A40924973 / A409-24-973 IPX180A A40914977 / A409-14-977 IPX500A A40914973 / A409-14-973 IPX500A