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Edwards EXT200/200H Split Flow - REBUILT
Weight
20 lbs
Pumping Speed
177 l/s
Ultimate Pressure
1 x 10-9 mbar
Edwards EXT200/200H Turbomolecular Vacuum Pump - REBUILT
The Edwards EXT turbomolecular and compound molecular pumps provide a reliable, hydrocarbon-free high and ultra high vacuum. Utilizing multi-stage axial flow turbines combined with magnetic and ceramic bearings, the EXT design provides oil and vibration free operation with minimal maintenance on high critical foreline pressure processes.
Questions? send an email to our sales team!
Specifications
EXT70/200H
EXT200/200H/HI
EXT200/200H GCMS
EXT200/200H ICPMS
Mass
9 kg
Side inlet-flange
DN 100 ISO
Main inlet-flange
DN 63 ISO
DN 100 ISO
Outlet-flange
DN 25 NW
Vent-port
1/8" BSP
Interstage-port (optional)
DN 25 NW
Main inlet pumping speed
N2
110 l/s
177 l/s
155 l/s
107 l/s
He
145 l/s
190 l/s
185 l/s
113 l/s
H2
130 l/s
163 l/s
175 l/s
102 l/s
Ar
-
153 l/s
104 l/s
Side inlet pumping speed
N2
155 l/s
He
131 l/s
179 l/s
187 l/s
H2
79 l/s
131 l/s
143 l/s
Ar
-
127 l/s
148 l/s
Interstage pumping speed
N2
-
8.75 l/s
N/A
He
-
10.4 l/s
N/A
Compression ratio from the backing port to the main inlet
N2
> 5 x 107
He
1 x 106
1 x 107
2.5 x 107
H2
3.5 x 104
-
5 x 105
Ar
-
> 5 x 107
Compression ratio from the side inlet to the main inlet
N2
6 x 103
1 x 104
9 x 103
He
6 x 102
1.5 x 102
2.5 x 102
H2
2 x 101
3.3 x 101
6 x 101
Ar
-
1.7 x 104
7 x 103
Maximum backing pressure
N2
12.6 mbar (1,260 Pa)
7.3 mbar (730 Pa)
-
He
7.7 mbar (770 Pa)
-
H2
2 mbar (200 Pa)
-
Ar
-
8 mbar (800 Pa)
Minimum backing pump displacement
0.6 m3 h-1
Maximum continuous inlet pressure - water-cooling at 35°C
Main inlet
2.5 x 10-3 mbar (2.5 x 10-1 Pa)
-
Side inlet
5 x 10-3 mbar (5 x 10-1 Pa)
-
Maximum continuous inlet pressure - air-cooling at 35°C
Main inlet
3 x 10-3 mbar (3 x 10-1 Pa)
5 x 10-3 mbar (He: 7.5 x 10-3 mbar)
1 x 10-2 mbar (Ar: 5 x 10-3 mbar)
Side inlet
9 x 10-3 mbar (9 x 10-1 Pa)
1.5 x 10-2 mbar (He: 5 x 10-3 mbar)
1 x 10-2 mbar (Ar: 5 x 10-3 mbar)
Operating attitude
Vertical and upright through to horizontal ± 2°
Vertical
Nominal rotational speed
60,000 r/min-1
Standby rotational speed
42,000 r/min-1
Starting time to 90% speed
EXDC160
110 sec
120 sec
150 sec
EXC100E
190 sec
-
EXC100L
-
245 sec
EXC120
130 sec
-
EXC300
100 sec
-
120 sec
EXDC80
-
270 sec
330 sec
Cooling method
Forced-air/ water
-
Ambient air temperature (forced-air cooling)
0 - 35°C
Water temperature (water-cooling)
10 - 20°C
-
Noise level (at 1 metre)
< 50 dB(A)
Recommended controller
EXDC160
EXDC160 maximum VA input
250 VA
Quiescent power
25 W
40 W
Recommended backing pump
RV3
Type
Label
Description
Download
Edwards EXT Split Flow Series - REBUILT
Instruction Manual
Download
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
Edwards MODEL: EXT200/200H Turbomolecular Vacuum Pump - REBUILT
CODE: B756-42-991 / B75642991 EXT200/200H GCMS 24V ROT (reversed body)
CODE: B756-41-991 / B75641991 EXT200/200H MK2S GC
CODE: B756-24-991 / B75624991 EXT200/200H 24V Agilent
B756-01-991 / B75601991 EXT200/200H PUMP ONLY 24V
NRA7-51-000 / NRA751000 EXT200/200H 80V CARTRIDGE
NRA0-93-000 / NRA093000 EXT200/200H 24V
NRB0-14-000 / NRB014000 EXT200/200H MK2E 80V
B756-02-991 / B75602991 EXT200/200HI 24V
B756-22-991 / B75622991 EXT200/200HI 24V
B852-00-523 / B85200523 nEXT200/200D REV SF 160W
B756-10-000R / B75610000R EXT200/200/30
NRC3-56-000 / NRC356000 EXT400/200/30IIH
B760-53-991 / B76053991 EXT400/200/30IPX CARTRIDGE
