Edwards EXT200/200H Split Flow - REBUILT
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REBUILT_EXT200/200H
| Weight | 20 lbs |
|---|---|
| Pumping Speed | 177 l/s |
| Ultimate Pressure | 1 x 10-9 mbar |
Edwards EXT200/200H Turbomolecular Vacuum Pump - REBUILT
The Edwards EXT turbomolecular and compound molecular pumps provide a reliable, hydrocarbon-free high and ultra high vacuum. Utilizing multi-stage axial flow turbines combined with magnetic and ceramic bearings, the EXT design provides oil and vibration free operation with minimal maintenance on high critical foreline pressure processes.
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Specifications | EXT70/200H | EXT200/200H/HI | EXT200/200H GCMS | EXT200/200H ICPMS |
|---|---|---|---|---|
| Mass | 9 kg | |||
| Side inlet-flange | DN 100 ISO | |||
| Main inlet-flange | DN 63 ISO | DN 100 ISO | ||
| Outlet-flange | DN 25 NW | |||
| Vent-port | 1/8" BSP | |||
| Interstage-port (optional) | DN 25 NW | |||
| Main inlet pumping speed | ||||
| N2 | 110 l/s | 177 l/s | 155 l/s | 107 l/s |
| He | 145 l/s | 190 l/s | 185 l/s | 113 l/s |
| H2 | 130 l/s | 163 l/s | 175 l/s | 102 l/s |
| Ar | - | 153 l/s | 104 l/s | |
| Side inlet pumping speed | ||||
| N2 | 155 l/s | |||
| He | 131 l/s | 179 l/s | 187 l/s | |
| H2 | 79 l/s | 131 l/s | 143 l/s | |
| Ar | - | 127 l/s | 148 l/s | |
| Interstage pumping speed | ||||
| N2 | - | 8.75 l/s | N/A | |
| He | - | 10.4 l/s | N/A | |
| Compression ratio from the backing port to the main inlet | ||||
| N2 | > 5 x 107 | |||
| He | 1 x 106 | 1 x 107 | 2.5 x 107 | |
| H2 | 3.5 x 104 | - | 5 x 105 | |
| Ar | - | > 5 x 107 | ||
| Compression ratio from the side inlet to the main inlet | ||||
| N2 | 6 x 103 | 1 x 104 | 9 x 103 | |
| He | 6 x 102 | 1.5 x 102 | 2.5 x 102 | |
| H2 | 2 x 101 | 3.3 x 101 | 6 x 101 | |
| Ar | - | 1.7 x 104 | 7 x 103 | |
| Maximum backing pressure | ||||
| N2 | 12.6 mbar (1,260 Pa) | 7.3 mbar (730 Pa) | - | |
| He | 7.7 mbar (770 Pa) | - | ||
| H2 | 2 mbar (200 Pa) | - | ||
| Ar | - | 8 mbar (800 Pa) | ||
| Minimum backing pump displacement | 0.6 m3h-1 | |||
| Maximum continuous inlet pressure - water-cooling at 35°C | ||||
| Main inlet | 2.5 x 10-3 mbar (2.5 x 10-1 Pa) | - | ||
| Side inlet | 5 x 10-3 mbar (5 x 10-1 Pa) | - | ||
| Maximum continuous inlet pressure - air-cooling at 35°C | ||||
| Main inlet | 3 x 10-3 mbar (3 x 10-1 Pa) | 5 x 10-3 mbar (He: 7.5 x 10-3 mbar) | 1 x 10-2 mbar (Ar: 5 x 10-3 mbar) | |
| Side inlet | 9 x 10-3 mbar (9 x 10-1 Pa) | 1.5 x 10-2 mbar (He: 5 x 10-3 mbar) | 1 x 10-2 mbar (Ar: 5 x 10-3 mbar) | |
| Operating attitude | Vertical and upright through to horizontal ± 2° | Vertical | ||
| Nominal rotational speed | 60,000 r/min-1 | |||
| Standby rotational speed | 42,000 r/min-1 | |||
| Starting time to 90% speed | ||||
| EXDC160 | 110 sec | 120 sec | 150 sec | |
| EXC100E | 190 sec | - | ||
| EXC100L | - | 245 sec | ||
| EXC120 | 130 sec | - | ||
| EXC300 | 100 sec | - | 120 sec | |
| EXDC80 | - | 270 sec | 330 sec | |
| Cooling method | Forced-air/ water | - | ||
| Ambient air temperature (forced-air cooling) | 0 - 35°C | |||
| Water temperature (water-cooling) | 10 - 20°C | - | ||
| Noise level (at 1 metre) | < 50 dB(A) | |||
| Recommended controller | EXDC160 | |||
| EXDC160 maximum VA input | 250 VA | |||
| Quiescent power | 25 W | 40 W | ||
| Recommended backing pump | RV3 | |||
| Type | Label | Description | Download |
|---|---|---|---|
|
Edwards EXT Split Flow Series - REBUILT | Instruction Manual | Download |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
Edwards MODEL: EXT200/200H Turbomolecular Vacuum Pump - REBUILT
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CODE: B756-24-991 / B75624991 EXT200/200H 24V Agilent
B756-01-991 / B75601991 EXT200/200H PUMP ONLY 24V
NRA7-51-000 / NRA751000 EXT200/200H 80V CARTRIDGE
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NRB0-14-000 / NRB014000 EXT200/200H MK2E 80V
B756-02-991 / B75602991 EXT200/200HI 24V
B756-22-991 / B75622991 EXT200/200HI 24V
B852-00-523 / B85200523 nEXT200/200D REV SF 160W
B756-10-000R / B75610000R EXT200/200/30
NRC3-56-000 / NRC356000 EXT400/200/30IIH
B760-53-991 / B76053991 EXT400/200/30IPX CARTRIDGE
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