Edwards nEXT200200D - REBUILT

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REBUILT_nEXT200200D

Edwards nEXT200200D Turbomolecular Vacuum Pump - REBUILT

The Edwards nEXT turbomolecular and compound molecular pumps provide a reliable, hydrocarbon-free high and ultra high vacuum. Utilizing multi-stage axial flow turbines combined with magnetic and ceramic bearings, the nEXT design provides oil and vibration free operation with minimal maintenance on high critical foreline pressure processes.

A nEXT pump has a turbomolecular pump with a permanently attached controller which has drive electronics. The controller controls the electrical supply to the pump with the exception of standby speed control. The controller has no manual controls and can be operated through the logic interface only.

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Specifications nEXT200200D nEXT200200iD nEXT200200T nEXT200200iT
Mass 9.1 kg 9.4 kg
Inlet flange DN 100 ISO
Outlet flange DN25NW
Vent & purge ports 1/8" BSP
Interstage port - DN 25 NW - DN 25 NW
Booster port - DN 25 NW
Main inlet pumping speed
N2 200 l/s
Ar 190 l/s
He 185 l/s
H2 145 l/s
Side inlet pumping speed
N2 165 l/s
Ar 145 l/s
He 225 l/s
H2 195 l/s
Side to main inlet port compression ratio
N2 8,500
He 500
H2 100
Backing to side port compression ratio
N2 > 1 x 107
He 1.7 x 105 5 x 105
H2 9 x 103 2 x 104
Interstage pumping speed
N2 - 13 l/s - 13 l/s
He - 13 l/s - 13 l/s
H2 - 11 l/s - 11 l/s
Peak booster pumping speed (nitrogen)
RV12 backing pump - 26 m3h-1 - 26 m3h-1
XDS10 backing pump - 24 m3h-1 - 24 m3h-1
Recommended backing pump RV12 / XDS10
Operating attitude Vertical and upright to horizontal ± 2°
Normal rotational speed 60,000 r/min-1
Starting time to 90% speed * 165 sec 195 sec
Sound pressure level (1 metre away) < 45 dB(A) ± 3 dB(A) Declared dual number noise emission values in accordance with ISO4871

Specifications
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Edwards nEXT200200 - REBUILT INSTRUCTION MANUAL Download

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Edwards MODEL: nEXT200200D Turbomolecular Vacuum Pump - REBUILT

CODE:  B852-00-522 / B85200522  nEXT200200D  160W SPEC
CODE:  B852-00-523 / B85200523  nEXT200200D  REV SF 160W
CODE:  B852-00-524 / B85200524  nEXT200200D  HQU ISO100 160W