Edwards high performance STPH301C turbomolecular pump has been designed for use in the harshest of semiconductor applications. The pumps field proven reliability and class-leading performance give maximum process flexibility. The STPH301C has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.
Advanced Rotor Technology
Higher gas throughput
Maximized process flexibility
Oil free
Low vibration
High reliability
Maintenance free
Harsh process compatible
Increased life
Advanced Controller Design
Auto tuning
Self diagnostic functions
DC motor drive
Battery-free operation
Compact Design
Small footprint
Half rack controller
5 Axis Magnetic Suspension System
Zero contamination
Low maintenance
Any orientation operation
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
