Edwards STP 451 - NEW
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SKU
NEW_STP451
| Weight | 26 lbs |
|---|---|
| Pumping Speed | 440 l/s |
| Ultimate Pressure | 1 x 10-9 Torr |
Edwards STP 451 Turbomolecular Vacuum Pump - NEW
Edwards high performance STPH301C turbomolecular pump has been designed for use in the harshest of semiconductor applications. The pumps field proven reliability and class-leading performance give maximum process flexibility. The STPH301C has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.
Advanced Rotor Technology
- Higher gas throughput
- Maximized process flexibility
- Oil free
- Low vibration
- High reliability
- Maintenance free
- Harsh process compatible
- Increased life
Advanced Controller Design
- Auto tuning
- Self diagnostic functions
- DC motor drive
- Battery-free operation
Compact Design
- Small footprint
- Half rack controller
5 Axis Magnetic Suspension System
- Zero contamination
- Low maintenance
- Any orientation operation
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Inlet flange | ISO160 |
| Outlet port | KF25 |
| Pumping Speed | |
| N2 | 440 l s-1 |
| H2 | 275 l s-1 |
| Compression ratio | |
| N2 | >108 |
| H2 | >2 x 104 |
| Ultimate pressure | 10-7 Pa (10-9 Torr) |
| Maximum allowable inlet pressure | |
| Ambient cooled | 0.066 Pa (5 x 10-4 Torr) |
| Maximum continuous outlet pressure | |
| Ambient cooled | 13 Pa (0.1 Torr) |
| Rated speed | 48000 rpm |
| Starting time | 3 min |
| Maximum inlet flange temperature | 120 °C |
| Input voltage | 100 to 120 V a.c. (± 10) or |
| 200 to 240 V a.c. (± 10) | |
| Power consumption | |
| Start up | 0.55 kVA |
| Weight | |
| Pump | 12 kg |
| Controller | 7 kg |
Specifications
| Type | Label | Description | Download |
|---|---|---|---|
|
BOC Edwards STP-301/451 Series | Instruction Manual | Download |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
Edwards STP 451 Turbomolecular Vacuum Pump - NEW