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Pfeiffer TMH / TMU 065 - REBUILT
Weight
15 lbs
Pumping Speed
36-56 l/s
Ultimate Pressure
1 x 10-10 mbar
Pfeiffer Vacuum TMH / TMU 065 Turbomolecular Pump - REBUILT
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Specifications
TMH 065
TMH/TMU 065
Inlet
DN 40 ISO-KF
DN 63 ISO-KF DN 63 CF-F
Outlet
DN 16 ISO-KF/G 1/4"
Venting connection
G 1/8”
Maximum permissible rotor temperature
90°C
Permissible heat radiation power
4 W
Electronic drive unit
TCP 0151)
Nominal rotation speed
90,000 l/min
Standby rotation speed
60,000 l/min
Run-up time (up to 90% rated rotation speed)
3 min
Noise level
< 50 dB(A)
Final pressure, backing pump
≤ 5 mbar
Volume flow rate for:
N2
30 l/s
56 l/s
He
40 l/s
48 l/s
H2
34 l/s
36 l/s
Compression ratio for:
N2
> 1010
He
1 x 107
H2
1 x 105
Maximum fore-vacuum pressure
N2
18 mbar
He
15 mbar
H2
8 mbar
Maximum gas throughput2)
N2
0.8 mbar
He
1 mbar
H2
1.2 mbar
Final pressure3)
w/ diaphragm vacuum pump
< 1 x 10-9 mbar
w/ rotary vane vacuum pump
< 1 x 10-10 mbar
Lubricant
TL 011
Cooling type, standard
convection
Cooling water consumption w/ water at 15°C
15 l/h
Cooling water temperature
5-25°C
Permissible ambient temperature w/ air cooling
0-35°C
Heating power consumption
40 W
Weight
4.7 kg
4.7 / 5.1 kg
Permissible magnetic field
4 mT
Specifications
1) Option: TCP 121, TCP 380.
2) Measured with rotary vane vacuum pump 1.5 m3 /h.
3) In accordance with DIN 28 428 the final pressure of a turbomolecular pump is that pressure which is attained in a measuring dome 48 hours after baking out.
Type
Label
Description
Download
Pfeiffer TMH/TMU 064 - 065 - REBUILT
Operating Instructions
Download
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
Pfeiffer Vacuum TMH / TMU 065 Turbomolecular Pump - REBUILT
PMP02356 / PM P02 356 TMH 065 DN 63 ISO-KF 19 pin
PMP02352 / PM P02 352 TMH 065 DN 40 ISO-KF
PMP02350 / PM P02 350 TMH 065 DN 63 ISO 8 pin
PMP02357 / PM P02 357 TMU 065 DN 63 CF 19 pin
PMP02351 / PM P02 351 TMU 065 DN 63 CF 8 pin