Pfeiffer TMH 520 - REBUILT
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SKU
REBUILT_TMH520
| Weight | 30 lbs |
|---|---|
| Pumping Speed | 300 l/s |
| Ultimate Pressure | 5 x 10-11 mbar |
Pfeiffer Vacuum TMH 520 Turbomolecular Pump - REBUILT
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| Specifications | TMH / TMU 520 | |
|---|---|---|
| Inlet | DN 100 ISO-K DN 100 CF-F |
DN 160 ISO-K DN 160 CF-F |
| Outlet | DN 25 ISO-KF G 1/4" |
|
| Electronic drive unit | TCP 380 / TCP 600 | |
| Final pressure, backing pump | ≤ 5 mbar | |
| Maximum permissible rotor temperature | 90°C | |
| Permissible heat radiation power | 10.5 W | |
| Nominal rotation speed | 50,000 l/min | |
| Standby rotation speed | 33,000 l/min | |
| Run-up time (up to 90% rated rotation speed) | 7/5 min | |
| Noise level | < 50 dB(A) | |
| Pumping speed for: | ||
| N2 | 300 l/s | 500 l/s |
| He | 400 l/s | 500 l/s |
| H2 | 400 l/s | 480 l/s |
| Compression ratio for: | ||
| N2 | > 1012 | |
| He | 5 x 107 | |
| H2 | 5 x 106 | |
| Maximum fore-vacuum pressure | ||
| N2 | 16 mbar | |
| He | 14 mbar | |
| H2 | 7 mbar | |
| Maximum gas throughput1) | ||
| N2 | 3 mbar | |
| He | 4 mbar | |
| H2 | 1 mbar | |
| Final pressure2) | ||
| w/ diaphragm vacuum pump | 5 x 10-11 mbar | |
| w/ rotary vane vacuum pump | 5 x 10-11 mbar | |
| Lubricant | TL 011 | |
| Cooling type, standard | water | |
| Cooling water consumption w/ water at 15°C3) | 50 l/h | |
| Cooling water temperature | 5-25°C | |
| Permissible ambient temperature w/ air cooling | 0-35°C | |
| Heating power consumption | 100 W | |
| Weight | 12.5 kg | 13 kg |
| Permissible magnetic field | 5 mT | |
1) Measured with rotary vane vacuum pump 1.5 m3/h.
2) In accordance with DIN 28 428 the final pressure of a turbomolecular pump is that pressure which is attained in a measuring dome 48 hours after baking out.
3) With max. gas throughput.
| Type | Label | Description | Download |
|---|---|---|---|
|
Pfeiffer TMH 520 - REBUILT | Operating Instructions | Download |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
Pfeiffer Vacuum TMH 520 Turbomolecular Pump - REBUILT PMP02420 / PM P02 420 TMH 520 DN 160 ISO-K PMP02423 / PM P02 423 TMH 520 U DN 160 ISO-K PMP02427 / PM P02 427 TMH 520 P DN 160 ISO-K PMP02660 / PM P02 660 TMH 520 SG IS DN 160 ISO-K
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