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Pfeiffer TMH 520 - REBUILT
Weight
30 lbs
Pumping Speed
300 l/s
Ultimate Pressure
5 x 10-11 mbar
Pfeiffer Vacuum TMH 520 Turbomolecular Pump - REBUILT
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Specifications
TMH 520
Inlet
DN 100 ISO-K
DN 160 ISO-K
Outlet
DN 25 ISO-KF
Electronic drive unit
TCP 380 / TCP 600
Final pressure, backing pump
≤ 5 mbar
Maximum permissible rotor temperature
90°C
Permissible heat radiation power
10.5 W
Nominal rotation speed
50,000 l/min
Standby rotation speed
33,000 l/min
Run-up time (up to 90% rated rotation speed)
7/5 min
Noise level
< 50 dB(A)
Pumping speed for:
N2
300 l/s
500 l/s
He
400 l/s
500 l/s
H2
400 l/s
480 l/s
Compression ratio for:
N2
> 1012
He
5 x 107
H2
5 x 106
Maximum fore-vacuum pressure
N2
16 mbar
He
14 mbar
H2
7 mbar
Maximum gas throughput1)
N2
3 mbar
He
4 mbar
H2
1 mbar
Final pressure2)
w/ diaphragm vacuum pump
5 x 10-11 mbar
w/ rotary vane vacuum pump
5 x 10-11 mbar
Lubricant
TL 011
Cooling type, standard
water
Cooling water consumption w/ water at 15°C3)
50 l/h
Cooling water temperature
5-25°C
Permissible ambient temperature w/ air cooling
0-35°C
Heating power consumption
100 W
Weight
12.5 kg
13 kg
Permissible magnetic field
5 mT
Specifications
1) Measured with rotary vane vacuum pump 1.5 m3 /h.
2) In accordance with DIN 28 428 the final pressure of a turbomolecular pump is that pressure which is attained in a measuring dome 48 hours after baking out.
3) With max. gas throughput.
Type
Label
Description
Download
Pfeiffer TMH / TMU 520 - REBUILT
Operating Instructions
Download
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Pfeiffer Vacuum TMH 520 Turbomolecular Pump - REBUILT
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