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Pfeiffer TMH / TMU 064 - REBUILT
Weight
8 lbs
Pumping Speed
53 l/s
Ultimate Pressure
< 2 x 10-10 mbar
Pfeiffer Vacuum TMH / TMU 064 Turbomolecular Pump - REBUILT
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Specifications
TMH 064
TMH/TMU 064
Inlet
DN 40 ISO-KF
DN 63 ISO-KF
Outlet
DN 16 ISO-KF/G 1/4"
Venting connection
G 1/8”
Maximum permissible rotor temperature
90°C
Permissible heat radiation power
4 W
Electronic drive unit
TCP 0151)
Nominal rotation speed
90,000 l/min
Standby rotation speed
60,000 l/min
Run-up time (up to 90% rated rotation speed)
2.5 min
Noise level
< 50 dB(A)
Final pressure, backing pump
≤ 5 mbar
Volume flow rate for:
N2
30 l/s
53 l/s
He
40 l/s
42 l/s
H2
20 l/s
31 l/s
Compression ratio for:
N2
> 109
He
7 x 104
H2
4 x 103
Maximum fore-vacuum pressure
N2
14 mbar
He
10 mbar
H2
6 mbar
Maximum gas throughput2)
N2
1.1 mbar
He
1.5 mbar
H2
1 mbar
Final pressure3)
w/ diaphragm vacuum pump
< 1 x 10-8 mbar
w/ rotary vane vacuum pump
< 2 x 10-10 mbar
Lubricant
TL 011
Cooling type, standard
convection
Cooling water consumption w/ water at 15°C
15 l/h
Cooling water temperature
5-25°C
Permissible ambient temperature w/ air cooling
0-35°C
Heating power consumption
40 W
Weight
3.6 kg
3.6 / 3.8 kg
Permissible magnetic field
4 mT
Specifications
1) Option: TCP 121, TCP 380.
2) Measured with rotary vane vacuum pump 1.5 m3 /h.
3) In accordance with DIN 28 428 the final pressure of a turbomolecular pump is that pressure which is attained in a measuring dome 48 hours after baking out.
Type
Label
Description
Download
Pfeiffer TMH/TMU 064 - 065 - REBUILT
Operating Instructions
Download
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Pfeiffer Vacuum TMH / TMU 064 Turbomolecular Pump - REBUILT
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PMP02363 / PM P02 363 TMH 064 SG DN 63 ISO-K
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PMP02366 / PM P02 366 TMH 064 DN 63 ISO-K
PMP02367 / PM P02 367 TMU 064 DN 63 CF-F
