Pfeiffer TMH / TMU 064 - REBUILT
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SKU
REBUILT_TMU064
| Weight | 8 lbs |
|---|---|
| Pumping Speed | 53 l/s |
| Ultimate Pressure | < 2 x 10-10 mbar |
Pfeiffer Vacuum TMH / TMU 064 Turbomolecular Pump - REBUILT
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| Specifications | TMH 064 | TMH/TMU 064 |
|---|---|---|
| Inlet | DN 40 ISO-KF | DN 63 ISO-KF DN 63 CF-F |
| Outlet | DN 16 ISO-KF/G 1/4" | |
| Venting connection | G 1/8” | |
| Maximum permissible rotor temperature | 90°C | |
| Permissible heat radiation power | 4 W | |
| Electronic drive unit | TCP 0151) | |
| Nominal rotation speed | 90,000 l/min | |
| Standby rotation speed | 60,000 l/min | |
| Run-up time (up to 90% rated rotation speed) | 2.5 min | |
| Noise level | < 50 dB(A) | |
| Final pressure, backing pump | ≤ 5 mbar | |
| Volume flow rate for: | ||
| N2 | 30 l/s | 53 l/s |
| He | 40 l/s | 42 l/s |
| H2 | 20 l/s | 31 l/s |
| Compression ratio for: | ||
| N2 | > 109 | |
| He | 7 x 104 | |
| H2 | 4 x 103 | |
| Maximum fore-vacuum pressure | ||
| N2 | 14 mbar | |
| He | 10 mbar | |
| H2 | 6 mbar | |
| Maximum gas throughput2) | ||
| N2 | 1.1 mbar | |
| He | 1.5 mbar | |
| H2 | 1 mbar | |
| Final pressure3) | ||
| w/ diaphragm vacuum pump | < 1 x 10-8 mbar | |
| w/ rotary vane vacuum pump | < 2 x 10-10 mbar | |
| Lubricant | TL 011 | |
| Cooling type, standard | convection | |
| Cooling water consumption w/ water at 15°C | 15 l/h | |
| Cooling water temperature | 5-25°C | |
| Permissible ambient temperature w/ air cooling | 0-35°C | |
| Heating power consumption | 40 W | |
| Weight | 3.6 kg | 3.6 / 3.8 kg |
| Permissible magnetic field |
4 mT
|
|
1) Option: TCP 121, TCP 380.
2) Measured with rotary vane vacuum pump 1.5 m3/h.
3) In accordance with DIN 28 428 the final pressure of a turbomolecular pump is that pressure which is attained in a measuring dome 48 hours after baking out.
| Type | Label | Description | Download |
|---|---|---|---|
|
Pfeiffer TMH/TMU 064 - 065 - REBUILT | Operating Instructions | Download |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
Pfeiffer Vacuum TMH / TMU 064 Turbomolecular Pump - REBUILT PMP02580 / PM P02 580 TMU 064 U SG DN 63 CF-F PMP02360 / PM P02 360 TMH 064 DN 63 ISO-K PMP02361 / PM P02 361 TMU 064 DN 63 CF-F PMP02362 / PM P02 362 TMH 064 DN 40 ISO-KF PMP02363 / PM P02 363 TMH 064 SG DN 63 ISO-K PMP02365 / PM P02 365 TMH 064 DN 40 ISO-KF PMP02366 / PM P02 366 TMH 064 DN 63 ISO-K PMP02367 / PM P02 367 TMU 064 DN 63 CF-F
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