Shimadzu TMP-1103LMP - REBUILT
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| Weight | 75 lbs |
|---|---|
| Pumping Speed | 1,080 l/s |
| Ultimate Pressure | 10-9 Pa |
Shimadzu TMP-1103LMP Turbomolecular Vacuum Pump - REBUILT
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| Turbomolecular pump | TMP-1103MP | TMP-1103MPC | TMP-1103LMP | TMP-1103LMPC | |
|---|---|---|---|---|---|
| Suitable power supply unit | EI-D1103M | ||||
| Cooling method | Cooling fan | Water | |||
| Ultimate pressure (Note 1) | 10-9 Pa order | 10-8 Pa order | 10-9 Pa order | 10-8 Pa order | |
| Maximum allowable inlet pressure (N2) |
1.3 Pa | 70 Pa | |||
| Maximum allowable outlet pressure | 270 Pa | 800 Pa | |||
| Pumping speed (Note 4) | N2 | 1,080 l/s | |||
| He | 1,040 l/s | ||||
| H2 | 800 l/s | ||||
| Compression ratio | N2 | 109 | |||
| He | 107 | ||||
| H2 | 106 | ||||
| Rated speed | 36,000 rpm | ||||
| Start-up time | 5 minutes or less | ||||
| Mounting position | In any desired direction (Note 3) | ||||
| Bake-out temperature at an inlet flange | 120°C or less | ||||
| Vibration level (by Shimadzu's method) | 0.01 µm or less (0-peak) | ||||
| Inlet flange | ICF253 (Note 4) | ||||
| Outlet flange | KF40 | ||||
| Mass | 32 kg | ||||
| Admissible throughput of purge gas | 20 to 30 ml/min (Note 5) | ||||
| Admissible pumping speed of backing vacuum pump in case of gas purge | 500 l/min or more | ||||
| Environmental temperatures | Operation: 0 to 40°C / Storage: -25 to 70°C | ||||
| Admissible ambient magnetic field | Radial direction | 3 mT | |||
| Axial direction | 15 mT | ||||
| Water | Flow rate | N/A | 1 to 3 l/min | ||
| Pressure | 0.2 to 0.5 MPa | ||||
| Temperature | 5 to 30°C | ||||
(Note 1) When using a metal at the inlet flange. When using an o-ring gasket, the ultimate pressure is 10-7 Pa order.
(Note 2) Without a protective net. Pumping speed for N2 is 970 L/s with a protective net.
(Note 3) The outlet of the magnetic bearing turbo molecular pump should face horizontally or vertically when installing horizontally.
(Note 4) ISO200 bolted flange, VG200 flange are also available.
(Note 5) mL/min : volume flow rate at 0 ℃ , 1 atm. (Compatible with SCCM.)
| Type | Label | Description | Download |
|---|---|---|---|
|
Shimadzu TMP-803 - 1303 - REBUILT | Instruction Manual | Download |
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Shimadzu TMP-1103LMP Turbomolecular Vacuum Pump - REBUILT
