Admissible pumping speed of backing vacuum pump in case of gas purge
500 l/min or more
Environmental temperatures
Operation: 0 to 40°C / Storage: -25 to 70°C
Admissible ambient magnetic field
Radial direction
3 mT
Axial direction
15 mT
Water
Flow rate
N/A
1 to 3 l/min
Pressure
0.2 to 0.5 MPa
Temperature
5 to 30°C
(Note 1) When using a metal at the inlet flange. When using an o-ring gasket, the ultimate pressure is 10-7 Pa order. (Note 2) Without a protective net. Pumping speed for N2 is 970 L/s with a protective net. (Note 3) The outlet of the magnetic bearing turbo molecular pump should face horizontally or vertically when installing horizontally. (Note 4) ISO200 bolted flange, VG200 flange are also available. (Note 5) mL/min : volume flow rate at 0 ℃ , 1 atm. (Compatible with SCCM.)
