Axcelis Technologies Vacuum System Support

PTB offers vacuum component support for your Axcelis Technologies high vacuum ion implant systems:

Purion, 200 PCU, GSD 200 implanter and more

Typical spares and service for Axcelis Technologies high vacuum systems:

1. 

   Edwards E2M80 - SERVICE

   Call for Price

   Out of stock

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2. 

   Edwards STP-A2203CV - REBUILT

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   Out of stock

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3. 

   CTI-Cryogenics On-Board IS 8F - REBUILT

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   Out of stock

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4. 

   CTI-Cryogenics IS-1000 - REBUILT

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   Out of stock

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5. 

   Agilent Varian TriScroll PTS600 - REBUILT

   $5,830

   In stock

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