Edwards STP-F2203C - REBUILT
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SKU
REBUILT_STPF2203C
| Weight | 135 lbs |
|---|---|
| Pumping Speed | 2,200 l/s |
| Ultimate Pressure | 1 x 10-6 torr |
Edwards Seiko Seiki STP-F2203C Turbomolecular Vacuum Pump - REBUILT
This turbo pump has advanced rotor technology that gives class-leading performance for maximum process flexibility. A new half rack controller gives additional space savings and incorporates d.c. drive technology for battery-free operation. The STP-A2203C has been approved for use by major etch, ion implant and deposition equipment manufacturers in the semiconductor and magnetic media industries.
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Inlet port flange | VG-250 / ISO-250F |
| Outlet port flange | KF-40 |
| Pumping speed | |
| N2 | 2,200 l/s |
| H2 | 1,200 l/s |
| Compression ratio | |
| N2 | > 108 |
| H2 | > 103 |
| Ultimate pressure | 10-6 Pa |
| Allowable backing pressure | 500 Pa |
| Flow rate of purge gas (N2) | 3.4 x 10-2 to 8.4 x 10-2 Pa x m3s |
| Rated speed | 27,000 rpm |
| Backup rotational speed | appx 6,000 rpm |
| Starting time | 7 - 8 min |
| Stopping time | 8 - 10 min |
| Noise | < 50 dBA |
| TMS | Available |
| Baking temperature | < 120°C |
| Lubricating oil | Not neccesary |
| Lubricating oil | Not neccesary |
| Installation position | Free |
| Cooling method | Water |
| Recommended backing pump | > 1,300 l/min |
| Mass | 61 kg |
| Ambient temperature | 0 - 40°C |
| Storage temperature | -25 - 55°C |
| Type | Label | Description | Download |
|---|---|---|---|
|
Edwards STP Series | Instruction Manual | Download |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
Edwards Seiko Seiki STP-F2203C Turbomolecular Vacuum Pump - REBUILT P/N PT50-0Z-006 / PT500Z006 STP-F2203C VG250 KF-40 VCRl/4
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