EBARA Authorized Distributor
The EBT is a ceramic bearing turbo vacuum pump for high tech manufacturer. The rugged mechanical bearing design is a cost effective solution and covers all relevant safety standards. Available with water, fan or convection cooling. The EV-A dry vacuum pump series are a family of air-cooled pumps that have industry-leading specifications. The family consists of the EV-A03 (9 CFM), the EV-A06 (21.6 CFM), and the EV-A10 (36 CFM) pumps. All three pumps have a non-contact, multi-staged roots design for reliable, particle-free vacuum generation. They are available with either single-phase or three-phase power. When used with the optional gas ballast valve, they have industry-leading water pumping capability. Typical applications include load locks, PVD systems, analytical instruments and electron microscopes. These pumps are ideal for replacing wet pumps as well as scroll-type dry vacuum pumps. The ESA is ideally for light to medium duty applications for hydrogen or light gas processing. Also for large volume chambers with harsh special applications. The perfect choice for both conditions.
